Fabrication of Microlens Array Using Photoresist Thermal Reflow

Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication

Concave Microlens Array Mold Fabrication in Photoresist Using UV Proximity Printing

This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and photoresist replication methods. The concave microlens array mold was made using a printing gap in lithography process, which utilizes optical diffraction of UV light to deflect away from the aperture edges and produc...

Replication of optical microlens array using photoresist coated molds.

A cost reduced method of producing injection molding tools is reported and demonstrated for the fabrication of optical microlens arrays. A standard computer-numerical-control (CNC) milling machine was used to make a rough mold in steel. Surface treatment of the steel mold by spray coating with photoresist is used to smooth the mold surface providing good optical quality. The tool and process ar...

A Surface Micromachined Optical Scanner Array Using Photoresist Lenses Fabricated by a Thermal Reflow Process

This paper presents the design, fabrication, and operation of a newly developed micromechanical optical scanner array using a translating microlens. We have used photoresist reflow techinique to form a microlens on a surface micromachined -stage of the scratch-drive actuation mechanism. The lens scanner is placed at the focal length from an incident optical fiber to collimate the transmitting l...

Fabrication of conical microneedles array using photolithography

Background and Aim: Microneedle technology has led to huge changes in the field of drug delivery medicine. Using microneedles, the drug can be injected locally, painlessly, and in very low and controlled doses with high precision. Local drug delivery through the skin with microneedles has many advantages over other methods of drug delivery. In this method, the drug does not enter the gastrointe...